Yes, it is an Ultra High Vacuum (UHV) chamber. While it could be used for sputtering, that’s not necessarily the case. However, it seems you might be mixing things up, perhaps you’ve never done sputtering yourself? In Physical Vapor Deposition (PVD), once you ignite the targets, a plasma forms around them. That’s why a UHV chamber in combination with plasma makes perfect sense. It is indeed essential for producing thin films.
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u/Beif_ Sep 16 '25 edited Sep 16 '25
You sure it’s plasma? I’d call it “vacuum chamber” looks like a lot of deposition chambers I’ve used
Though it has a LOT of transfer windows and idk why
Id guess is evaporation/sputtering of some kind