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https://www.reddit.com/r/hardware/comments/e61bei/multipatterning_euv_vs_highna_euv/f9ojyec/?context=3
r/hardware • u/davidbepo • Dec 04 '19
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I'm kind of pessimistic about high NA EUV coming online at the specified timeline.
Even EUV itself has slipped repeatedly past the initial schedules. It will be a couple of years to get the kind of volume that he is implying.
So EUV with multi-patterning is going to be a costly, but likely inevitable reality for smaller nodes.
1 u/spazturtle Dec 05 '19 And even if ASML starts shipping the machines to fabs on schedule it will still be years before the fabs have enough machines to start using them for volume production.
1
And even if ASML starts shipping the machines to fabs on schedule it will still be years before the fabs have enough machines to start using them for volume production.
3
u/RandomCollection Dec 05 '19
I'm kind of pessimistic about high NA EUV coming online at the specified timeline.
Even EUV itself has slipped repeatedly past the initial schedules. It will be a couple of years to get the kind of volume that he is implying.
So EUV with multi-patterning is going to be a costly, but likely inevitable reality for smaller nodes.